Vacuum pumps and solutions for plasma treatment technology
What is vacuum plasma treatment?
Plasma treatment is a versatile technology widely used in various industries, including electronics, semiconductor fabrication, automotive, medical, etc. Typical process gases are Oxygen, Argon or CF4. These gases are ionized with an electric field under vacuum to form a plasma which is used to coat, clean, activate or etch a surface to modify the surface cleanliness, adhesion, or functionality.
Vacuum plays a crucial role in plasma treatment systems to create and maintain plasma conditions effectively.
- Efficient process reaction: Reactive ions generated in the plasma under vacuum can diffuse to the surface more effectively for surface modification, cleaning, activation, or etching processes.
- Uniform surface treatment: Vacuum can ensure a contaminant-free environment to safeguard a uniform plasma for precise control of the surface modification.
How plasma treatment challenges your vacuum system
The main challenge for vacuum pumps or pumping systems is that activated ions (e.g., oxygen ions or fluorine ions) are evacuated during process and could enter the pump. These ions are highly reactive and toxic to the environment and human health.
Oxygen ions and fluorine ions can have a significant impact on the pumps materials. Oils and seals could be oxidized, decomposed or degraded. The right selection of oil and seal materials is therefore crucial for a successful pump usage.
Which type of pump is suitable for vacuum plasma treatment?
Different types of vacuum pumps could be used. Only the right choice of vacuum pumps and systems ensures to handle the different outgassing of plasma treatment technology and a trouble-free operation with highest uptime to optimize your cost of ownership.
Leybold has extensive experience, and our products are well-proven in different plasma treatment processes. For each plasma treatment process, Leybold can offer a perfect vacuum solution for the customer’s requirement.
Discover our products for plasma treatment below, or contact us to discuss your project.
- TRIVAC B
- RUVAC
- VARODRY
- DURADRY
- DRYVAC
TRIVAC B
TRIVAC B
Oil sealed double stage vane pumps excel with a high vacuum performance by delivering a low ultimate pressure. The BCS-PFPE version excels for highly reactive plasma applications.
RUVAC
RUVAC
Three different series WA(U), WS(U) and WH(U) and a wide pumping speed range of 251 to 9800 m³/h. The optional operation with frequency converter enables a precise process control. WS(U)-PFPE and WH-PFPE version are available for highly reactive plasma applications
VARODRY
VARODRY
Completely oil free, air-cooled dry screw pump with suction speeds of 65 to 200 m³/h which helps to optimize your cost of ownership. The VARODRY HD O2 version is perfect for O2 plasma treatment.
DURADRY
DURADRY
Water-cooled dry screw pumps with 160 or 250 m³/h pumping speed. Best in class noise level, compact design and hermetically sealed. The stable heat management enables excellent Argon and light gas handling. Highest robustness to support nearly all plasma treatment processes.
DRYVAC
DRYVAC
Compact, hermetically sealed and proven design, combined with highest robustness and energy efficiency. Offers reliable performance and increased uptime for plasma treatment processes, suction speeds from 200 to 800 m³/h.
TRIVAC B
Oil sealed double stage vane pumps excel with a high vacuum performance by delivering a low ultimate pressure. The BCS-PFPE version excels for highly reactive plasma applications.
RUVAC
Three different series WA(U), WS(U) and WH(U) and a wide pumping speed range of 251 to 9800 m³/h. The optional operation with frequency converter enables a precise process control. WS(U)-PFPE and WH-PFPE version are available for highly reactive plasma applications
VARODRY
Completely oil free, air-cooled dry screw pump with suction speeds of 65 to 200 m³/h which helps to optimize your cost of ownership. The VARODRY HD O2 version is perfect for O2 plasma treatment.
DURADRY
Water-cooled dry screw pumps with 160 or 250 m³/h pumping speed. Best in class noise level, compact design and hermetically sealed. The stable heat management enables excellent Argon and light gas handling. Highest robustness to support nearly all plasma treatment processes.
DRYVAC
Compact, hermetically sealed and proven design, combined with highest robustness and energy efficiency. Offers reliable performance and increased uptime for plasma treatment processes, suction speeds from 200 to 800 m³/h.
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